MiniQ S

• Capable of achieving vacuum of 5x10⁻² mbar
• Gold target as standard
• Capable of sputtering Au, Au/Pd, and Ag
• Pre-set profiles with single-touch operation
• Sputter head is hinged for easy operation
• Detachable chamber with implosion guard and top-plate allowing for easy cleaning
• Automatic operation with minimal user intervention required
• Compact sized; ideal for use with benchtop SEMs
• Possibility of coating samples to 50 mm diameter

• Table-top SEM coater
• Low and medium magnifications

Instrument Dimensions

225mm W x 420mm D325 x 325mm H (480mm H with the coating head open)

Weight

8.7kg

Sputter Target

• Disc-style 57 mm Ø 0.1mm thick gold (Au) target is included in the accessory pack
• Gold/palladium (Au/Pd) and silver (Ag) target options available

Specimen Stage

50 mm Ø stage

Pump

You can purchase the instrument with a pump, or without. Please note, the MiniQS specifications are based on use with a Pfeiffer Duo 6 pump.