Q150T ES Plus

• Capable of achieving vacuum of 5x10⁻⁵ mbar
• Chromium target as standard
• Capable of sputtering non-oxidizing and oxidizing metals e.g. Cr, Ir, W, Al, Ti, Au, Pt
• Capable of carbon rod evaporation (carbon fibre evaporation available as option)
• Touch and swipe capacitive screen
• USB port for upgrades and download of process log files
• Multiple-user profiles can be set up on one instrument
• 16GB of memory can store more than 1000 recipes
• Multi-colour LED visual status indicator

• High resolution SEM and FIB-SEM Protective platinum layers for FIB
• Carbon coating for elemental analysis and carbon coating of TEM grids

Instrument case

585 mm W x 535 mm D x 410 mm H

(total height with coating head open: 650 mm)

Weight

28 kg (packed: 42 kg)

Packed dimensions

725 mm W x 660 mm D x 680 mm H

Work chamber

Borosilicate glass 150 mm ID x 127 mm H

Display

115.5mm W x 86.4mm H (active area), 640 RGB x 480 (display format), capacitive touch colour display

User interface

Full graphical interface with touch screen buttons includes features such as a log of the last 1000 coatings and reminders for when maintenance is due.

Sputter target

Disc-style 57 mm Ø 0.5 mm thick chromium (Cr) target is fitted as standard. T S and T ES versions only. Pt, Pt/Pd, Pt, Au, Au/Pd, Ni, Ag, Pd, Cu, Cr, W, Al, Ti, Fe, Ir, Co, Sn, Mo, Mg, Ta and ITO target options available in various thicknesses.

Carbon evaporation source

Carbon rods 3.05mm X 300mm x 10 qty are supplied with carbon rod head as standard. Carbon fibre head option available. T E and T ES versions only.

Specimen stage

50 mm Ø rotation stage with rotation speed of 8-20 rpm.

Other stages available on request.