Q150TS

• Touch and swipe capacitive screen
• USB port for upgrades and download of process log files
• Multiple-user profiles can be set up on one machine
• 16GB of memory can store more than 1000 recipes
• Multi-colour LED visual status indicator
• Capable of achieving vacuum of 5 x 10 -5 mbar
• Chromium target as standard
• Capable of sputtering oxidizing and non-oxidizing metals e.g Cr, Ir, W, Al, Ti

• High resolution SEM and FIB-SEM Protective platinum layers for FIB
• Carbon coating for elemental analysis

Instrument case

585 mm W x 535 mm D x 410 mm H

(total height with coating head open: 650 mm)

Weight

28 kg (packed: 42 kg)

Packed dimensions

725 mm W x 660 mm D x 680 mm H

Work chamber

Borosilicate glass 150 mm ID x 127 mm H

Display

115.5mm W x 86.4mm H (active area), 640 RGB x 480 (display format), capacitive touch colour display

User interface

Full graphical interface with touch screen buttons includes features such as a log of the last 1000 coatings and reminders for when maintenance is due.

Sputter target

Disc-style 57 mm Ø. 0.3 mm thick chromium (Cr) target is fitted as standard. T S and T ES versions only

Specimen stage

50 mm Ø rotation stage with rotation speed of 8-20 rpm.

Other stages available on request.