Product Information
- Single sputter head
- Large Chamber (300 mm Ø) E Pump-down Vacuum: 5x10 mbar
- Chromium and Carbon rod as standard
Instrument case
590 mm W x 535 mm D x 420 mm H (maximum height during the opening of the coating head: 772 mm)
Weight
36 kg (packed: 59 kg)
Packed dimensions
730 mm W x 630 mm D x 690 mm H
Work chamber
Borosilicate glass with integral PET implosion guard Size 300 mm outside diameter x 127 mm High
Display
115.5mm W x 86.4mm H (active area), 640 RGB x 480 (display format), capacitive touch colour display
User interface
Full graphical interface with touch screen buttons, includes features such as a log of the last 1000 coatings and reminders for when maintenance is due
Sputter target
Disc-style 57 mm Ø. A 0.3 mm thick chromium (Cr) is fitted as standard.
Specimen stage
A flat adjustable stage capable of accepting either 4” or 6” wafers is mounted on a swinging arm stage, which rotates the stage under the targets to optimise coating. Rotation speed is variable from 14rpm to 38rpm
