Product Information
- Triple sputter head single target
- Large Chamber (300 mm Ø)
- Pump-down Vacuum: 5x10-5 mbar
Instrument case
590mm W x 535mm D x 420mm H (maximum height during the opening of the coating head: 772mm)
Weight
36 kg (packed: 59kg)
Packed dimensions
730 mm W x 630 mm D x 690 mm H
Work chamber
Borosilicate glass with integral PET implosion guard Size 300 mm outside diameter x 127 mm High
Display
115.5mm W x 86.4mm H (active area), 640 RGB x 480 (display format), capacitive touch colour display
User interface
Full graphical interface with touch screen buttons, includes features such as a log of the last 1000 coatings and reminders for when maintenance is due
Sputter target
3x Disc-style 57 mm Ø. A 0.3 mm thick chromium (Cr) is fitted as standard.
Specimen stage
A flat rotation stage for 6”(150mm) and 8” (200mm) wafers is fitted as standard.
A rotating/tilt stage and the ‘rota cota’ rotary tilt stage are also options
NB: Please note it is not possible to sequentially sputter three different sputtering metals from each sputtering head – for sequential coating see the Q300T D Plus.
